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Dry Vacuum Pump

Ebara ESA Series Dry Vacuum Pump

The ESA series was developed for pumping large volumes of gases and is specially targeted at load lock , transfer chamber with large volume of non corrosive gas that requires fast pump down time.

This pump is proven on both LCD and semiconductor production Fabs.

 

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Model ESR vacuum_esr

  Ebara ESR Series Dry Vacuum Pump

The ESR-series was developed to meet the needs for lower power consumption and smaller pump foot print.

These model are extremely suitable for light & medium process like SEM, Load Lock , PVD, Ashing , Ion Implantation and Etch,

The ESR20N, ESR80WN and ESR200WN models has controllable pumping speed which can provide suitable vacuum range to cater more specifically to the process applications.

In general, the ESR series has a reduced power consumption of up to 60% compared to the AA-series and is 40% smaller in installation area, 50% smaller in volume and 30% smaller in weight.

     

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Model EST vacuum_est

 

Ebara EST Series Dry Vacuum Pump

The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for increased pumping speed. The EST Series covers a wide pumping speed range from 88 to 1766 CFM.

     

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Model EV-A10 ev-a10

 

 EV-A Series Dry Vacuum Pump

A Generation of Air-Cooled Vacuum Pumps

The new EV-A dry vacuum pump series provides a constant pumping speed with exceptional pumping performance at atmospheric pressure.

EBARA used its proven design capabilities to develop a work-horse tool for the clean dry vacuum industries. The dry pumps, air cooled with an ultimate pressure of 10E-2 mbar (1 Pa), are unique in their performance and able to provide the benefit of a dry pump without the need of water cooling.

The ease of installation, plug and pump, in combination with the high water vapour tolerance capability (gas ballast open) makes thse vacuum pumps the prefered choice where clean dry vacuum is needed in various applications.  

Customer Benefits

  • Air-cooled - no cooling water needed
  • Oil free vacuum - no hydrocarbon issue in the vacuum system
  • Low noise level - user friendly
  • Low power consumption
  • Maintenance free operation - no tip-seals
  • Compact design
     

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EV-S ev-s

 

EV-S Series Dry Vaccum Pump

Efficient and Energy Saving
The need to reduce energy is a major subject for sustainability. Manufacturers employ large numbers of aging dry vacuum pumps. Depending on the process, the vacuum system alone can contribute up to 60% of the total electricity demand for a process tool. Upgrading the vacuum pumps can reduce the fab's energy consumption and save your money.

EBARA has developed a new and more efficient vacuum pump designed by improving motor efficiencies, optimized number of compression stages, enhancing motor control and adding intelligent communications, the energy consumption of the dry pump will be significantly reduced. This results in lower operation costs and improved profitability for our customer.

Customer Benefits

  • Lowest power consumption: Decreased user's Cost of Ownership and reduced company's carbon emissions
  • Smaller weight and dimensions compared to earlier models: User friendly
  • No N2 purge in clean applications: No nitrogen required
  • Flexible rotation speed and idle mode as standard: Further power saving
     
ev-m502n  

 EV-M Series Dry Vaccum Pump

New innovative Pump Design for Harsh Processes 

EBARA is launching a new vacuum pump design for harsh processes. The pumps have smaller dimensions and a 50% lower power consumption than the EST series. EV-M series have generally a higher H2 pumping speed compared to screw type vacuum pumps.

Customer Benefits

  • Lowest power consumption: Decreased user's Cost of Ownership and reduced company's carbon emissions
  • Smaller weight and dimensions compared to earlier models: User friendly

  • Higher H2 pumping speed compared to screw type vacuum pumps
  • Flexible rotation speed and idle mode as standard: Further power saving
     

Click below to download brochure
Model PDV pdv500

 

Ebara PDV Series Dry Vacuum Pumps 

Provides for a clean, reliable vacuum for today’s high tech manufacturing, semiconductor, thin film, photovoltaic, biomedical and pharmaceutical industries. The PDV Series Dry Vacuum Pumps offers an oil free energy efficient solution for replacing scroll and oil pumps for clean applications. The PDV Series Dry Vacuum Pumps require no annual maintenance and offers a low cost of ownership and higher return on investment (ROI). The serial communication allows both remote monitoring and control to the PDV Series Dry Vacuum Pumps.

Customer Benefits

  • Oil Free - No hydrocarbon issue in the sys
  • Innovative frictionless design - No particulate generation
  • Low noise level - User friendly
  • Lowest ultimate pressure in its class - Best vacuum for money
  • Air cooled - No cooling water required
  • Non-contact rotor, no sealing exchange - Long-lasting until maintenance required
  • Highly reliable due to EBARA's experience - Long lifetime

Applications 

  • Physical and Chemical Science 
  • Electron Microscopes
  • Mass Spectrometers 
  • Surface Analysis
  • Leak detection systems 
  • Backing pumps for turbo pumps 
  • RGA
  • Load lock vacuum
  •