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OZW Ozonized Water Generator

Ebara Ozonier continuously supplies clean ozonized water to meet the requirements of next-generation wet process through the use of a Teflon® hollow fiber membrane, a clean and high-concentration Ozonized Water Generator and a particle-free pump.


  • High concentration, large volume ozonized water supply
    The system is capable of providing a continuous supply of ozonized water at a 3~30mg/L ozone concentration (as O3) at a flowrate of 0.3~1.5m3 (5~25 L/min). Both the ozone concentration of the ozonized water and its flowrate are variable to suit the required operating conditions.

  • Impurity-free ozonized water
    The use of the clean ozonizer and particle-free pump specially developed by Ebara Corporation marks a major advancement in virtually eliminating impurities. The dispersive dissolving of ozone gas in ultra-pure water through a Teflon hollow-fiber membrane also marks a significant step toward virtually eliminating the ingress of TOC and heavy metal impurities

  • Superior concentration and flow rate stability
    The ozonized water is monitored on line with UV absorption type concentration meters and the measurement data are used for feedback control to control the rate of ozone gas generation to the optimum level. Thus, it is possible to stablize the ozone concentration at a steady level.
    The use of an inverter control type infinitely variable speed particle-free pump it is possible to supply a constant flow of ozonized water even when fluctuations in inlet pure water pressure occur and when system has been installed so that a level difference exists betweeen the wet station and the ozonizer.

  • Superior ease of operation, safety and reliability make the system ideally suited for production line use
    To facilitate operation in combination with a wet station, built-in coupled operating signal and interlock signal circuits are provided, with the system configuration designed to assure easy maintenance of all units. When in emergency, the built-in safety circuits will operate to stop the system safely. This system has won high acclaim for its outstanding reliability

  • DRO System
    The system is capable of providing higher functional water to combine Ebara deaeration water generator (H2, N2, CO2)


Ebara Ultra High Concentration Clean Ozonizer- OZC series

Ebara OZC series generates high concentration ozone by using combined discharge technology.


  • Steadily generates large volumes of highly concentrated ozone ( 10 vol% or higher)
  • Achieves ultra clean ozone through the adoption of ceramic coated electrodes and sapphire dielectrics
  • Equipped ozone leak sensor as standard

NDC Series

The NDC series compact magnetic pumps transport and pressurize ultrapure water and liquid chemicals to meet the requirements of the semiconductor and liquid-crystal manufacturing processes. Hydrodynamic bearings eliminate mechanical contact and the resulting particle emissions from the pump interior. Additionally, metallic ion elusion and pulsation have been virtually eliminated.


  • Particle-free
    Hydrodynamic bearings eliminate mechanical contact and reduce particle emissions to extremely low levels.
  • High quality
    The utilization of high purity ceramics and silicon tetrafluoride resins suppresses metallic ion elusion to below detectable levels.
  • Low pulsation
    This centrifugal pump minimizes pulsation, suppresses reemissions from the filter and significantly improves filtration.
  • Compact, low noise, non-contact seal, variable speed, 50/60 Hz common use.

PJ Series

PJ series high pressure pumps utilize ultra pure water for single water process-type wafer cleaning. Pump surface purity is maintained through electrolytic polishing of the interior surfaces. Simple pump construction has minimized the area which comes in contact with the ultra pure water, and eliminating mixing of particles produced from the seal parts with the jet water


  • Simple construction
    One wafer can be cleaned with one stroke operation. Simple construction and minimal movement decreases the number of particles produced.
  • Clean sealing
    Anti dust wipers prevent particles produced in the high pressure seal part from entering the discharge water
  • Always clean
    Overflow construction keeps the pump filled with fresh water even when the pump is not operating. Because there is no stationary water, the growth of bacteria can be prevented, and startup time after long shutdown periods is reduced.
  • Simple maintenance
    Clean discharge water makes filter replacement trouble free.
  • Space efficient with low operating noise