Epix Filter (Environmental Protection Ion Exchange Filter)

The Epix filter remove even trace quantities of gas in clean rooms!

Features

• Easy installation in existing clean rooms
  Because materials are made of nonwoven fabric, filters are lightweight and cause minimum pressure loss.
• High removal ability of extreme low concentration gas
  Quick response time due to high density ion exchange base
• No impurities are discharged to the downstream
  This product is free of catalyzers and other impurities
• No absorbed gas emission by room temperature increase
  (Maximum working temperature: 50 degree celsius)

• Flexible selection of combinations of cationic and/or anionic non woven fabrics

This system utilizes a reaction tank filled with chemical agents to detoxify exhaust gases produced by dry etching and CVD systems.

Features

• Constant monitoring of absorption conditions
• Simple canister replacement
• Requires limited installation space
• Capable of interfacing with monitoring systems

Ebara Gas Decomposition by Combustion System

Both cleaning gas and decomposition gas to be treated effectively and low cost at the same time.

Features

• Maximum treatment ability as inflow gas volume : 250Umin
• Low fuel consumption rate and high treatment efficiency
  burner system
• High decomposition ability of PFCs
• Low consumption of the AIR as burning and dilution
• Cieaning gases and deposition gases can be treated in
  the same time
• Low water consumption

Applicable Gases

• SiH₄. H₂. PH₃.TEOS .WF₆ etc. (Flamable gases)
• NF₃.C₂F₆-SF₆-CF₄.CHF₃ etc. (PFCs)