Ebara Chemical Mechanical Polishing System

The F*Rex series are clean room compatible Chemical Mechanical Polishing Systems with proven high reliability and advanced process performance. Various options are available to meet every customer's needs.

Advantages

• Dry-InlDry-out.
  2 polish platens, 4 clean stations.
  
• Advanced Process Performance
  1 head per platen
  
• Improved Productivity
  High Throughput
  Small Footprint
  High reliability
  
• 3 Step Chemical Clean Capability
  
• Process End Point Monitor(0ption)
  
• In-line Thickness Monitor(0ption)
  
• Customer specific options
  
• High volume production capable
  Slurry Supply Unit
  Slurry Controlled Supply System
  Wastewater Treatment System utilizing the zero emission conceptions
  SECS/GEM, HSMS communication