Home | Contact Us | Sitemap
EBARA ENGINEERING SINGAPORE
 
 
HOME arrow PRECISION MACHINERY arrow Systems arrow Planarisation Processing
Precision Machinery
 
Component
  > Dry Vacuum Pump
 

> Turbo Pump

  > Cleaning
  > Environment
   
System
  > Planarisation Processing
  > Plating
   
  Other Services
   
  Used Pumps
   
 

 

 

Planarisation Processing

Ebara Chemical Mechanical Polishing System

system_cmp

 

 

 

 

 

 

 

 

The F*Rex series are clean room compatible Chemical Mechanical Polishing Systems with proven high reliability and advanced process performance. Various options are available to meet every customer's needs.

Advantages

  • Dry-InlDry-out.
    2 polish platens, 4 clean stations.
  • Advanced Process Performance
    1 head per platen
  • Improved Productivity
    High Throughput
    Small Footprint
    High reliability
  • 3 Step Chemical Clean Capability
  • Process End Point Monitor(0ption)
  • In-line Thickness Monitor(0ption)
  • Customer specific options
  • High volume production capable
    Slurry Supply Unit
    Slurry Controlled Supply System
    Wastewater Treatment System utilizing the zero emission conceptions
    SECS/GEM, HSMS communication