Ebara Chemical Mechanical Polishing System
The F*Rex series are clean room compatible Chemical Mechanical Polishing Systems with proven high reliability and advanced process performance. Various options are available to meet every customer's needs.
2 polish platens, 4 clean stations.
- Advanced Process Performance
1 head per platen
- Improved Productivity
- 3 Step Chemical Clean Capability
- Process End Point Monitor(0ption)
- In-line Thickness Monitor(0ption)
- Customer specific options
- High volume production capable
Slurry Supply Unit
Slurry Controlled Supply System
Wastewater Treatment System utilizing the zero emission conceptions
SECS/GEM, HSMS communication