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Turbo Pump

Turbomolecular Pumps

A Turbomolecular Pump is a transfer type, mechanical high vacuum pump that consists of a rotating turbine blade (rotation speeds as high as 90k rpm) which imparts kinetic energy on the gas causing the molecules to move towards the turbomolecular pump exhaust. All EBARA  turbo pumps are compound turbo pumps which add a second molecular drag stage to the same shaft. The addition of this stage increases the compression ratio of the pump and also greatly increases the highest allowable foreline pressure of the pump.  




Ebara Model EMT Turbomolecular Pumps


The EMT Series Turbomolecular Pumps are 5-axis magnetically levitated vacuum pumps that are completely hydrocarbon free. These pumps are suitable for varied applications from the harshest semiconductor application as well as ultra-high vacuum and ultra-low vibration applications.

Beside the Standard Version, the EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.

The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

The Ultra high vacuum model turbomolecular pumps efficiently evacuate the lightest gases from high vacuum down to the ultra high vacuum region by reducing the materials' out gassing and improving the efficiency of hydrogen compression. The Ultra high vacuum model turbomolecular pump can achieve 10-10 mbar (10-8 Pa) with a short bake-out period.

The Ultra Low Vibration model turbomolecular pumps meets today's cutting edge challenges in EUV lithography, Micro-machining (MEMS), CD line width measurement, SEM/TEM Electron Microscopy, XPS and Nano-technology analytical tools. The Ultra low vibration model turbomolecular pumps produce less than 1nm vibration amplitude.

Technical Characteristics:

  • Full magnetic bearing
  • Installation in any orientation
  • High throughput
  • Compact size
  • Rotational speed control
  • Vibration free
  • Air or water cooled 




Model EBT Turbo Molecular Pump 


The EBT Series are mechanical bearing compound turbomolecular pumps which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series are highly efficient, cost effective solutions to your high vacuum pumping requirements.

EBARA’s EBT Series compound turbomolecular pumps offer an extremely rugged mechanical bearing design which provides clean, reliable vacuum generation for today’s high tech manufacturing. Typical applications include semiconductor, thin film, photovoltaic and analytical instruments.

EBARA’s EBT Series compound turbomolecular pumps can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high light gas compression, making them ideal for UHV and analytical systems.

The EBT70 and EBT240 pumps are available with an optional integrated controller. All EBARA EBT Series compound turbomolecular pumps as available with either water or fan cooling, and the EBT70 is available with convection cooling.

Technical Characteristics:

  • Durable structure for Air Inrush
    Installation in any orientation
    High throughput
    Compact size
    Vibration free
    Air or water cooled
    Safety Standards CE, UL, SEMI, NRTL

Turbo Molecular Pump Series

EBARA's turbomolecular pumps offer full magnetic levitation, which provides for a clean, reliable vacuum for today's high technology environments.  The ET Series features a five axis magnetic bearing and tuning free half rack controllers. Our TMP series consists of a wide range of product sizes and configurations.


  • Substantial Protective Function
  • Installation at Any Orientation
  • Half rack size controller
  • Free tuning
  • Battery-less
  • Built-in heat controller
  • Display of pump operating information via LCD
  • Communication function
  • Covers CE-marking . SEMI standards