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When it comes to servicing Ebara dry vacuum pump,
Who is better qualified than Ebara team itself?

Enquire for Service and Support today.

If you have Ebara dry vacuum pumps that require servicing, speak to our sales team now at (+65) 6862 3536, or fill in the form below. Our friendly sales person will make the most appropriate arrangement with you to get your pumps refurbished and returned to you in a timely manner.

Best of all? We offer competitive pricing that will meet your budget and you will have peace-of-mind knowing that your pumps can support your operation until the next scheduled maintenance cycle.  

When your pumps arrive at Ebara service centre, our Quality Assurance department ensures that every process conforms to our in-house standards and critical inspection, assembly, & testing parameters recorded in our database for traceability and audit purposes. 

Pump Overhaul Process Flow

Part Inspection
Module Assembly
Total Assembly
Leak Test
Performance Test

Key Features

Your Ebara dry vacuum pump will be serviced by our experienced technicians according to Ebara Japan’s stringent quality standards.

  • Thorough decontamination and cleaning to remove process by-products.
  • Careful inspection to ensure parts in good condition before assembly.
  • Only OEM-approved original consumable parts are used.
  • Detailed testing to ensure pump parameters and performance within specifications.
  • Trusted by big names in semiconductor industry.
Decontaminated parts ready for inspection
Senior assembler performing inspection before installation

Service Requisition Form

Get in touch with us today, call (+65) 6862 3536 or contact us now!


We provide repair and overhaul services for EBARA turbo molecular pump. Kindly contact our sales for more details.

Refurbished Pump

Preowned dry pumps that have undergone quality refurbishment by Ebara Singapore is available for sale.
Kindly contact our sales for more details.

Post Sale Services (Field Service)

Let our experienced field service engineers support your Ebara products behind the scene so that you can concentraate on your operation. We provide the following value added services:

  • Pump installation and commissioning
  • User training to familiarise with do’s and don’ts of using Ebara products 
  • Perform on-site repair (subject to failure mode) and troubleshooting 
  • Preventive maintenance program whereby Ebara field service team will alert users before defined maintenance cycle is due

Contact our sales for service contract to enjoy the following benefits:

  • On-site engineers ready to attend to you to minimize tool downtime
  • Spare pump support
  • Routine inspection for early detection of abnormal symptoms