Dry Vacuum Pump EV-M Series

New innovative Pump Design for Harsh Processes
EBARA is launching a new vacuum pump design for harsh processes. The pumps have smaller
dimensions and a 50% lower power consumption than the EST series. EV-M series have generally a
higher H2 pumping speed compared to screw type vacuum pumps.
Customer Benefits:
 Lowest power consumption: Decreased user's Cost of Ownership and reduced company's
carbon emissions
 Smaller weight and dimensions compared to earlier models: User friendly
 Higher H2 pumping speed compared to screw type vacuum pumps
 Flexible rotation speed and idle mode as standard: Further power saving