Precision Machinery Products
Dry Vacuum Pump ESA Series
The ESA series was developed for pumping large volume of gases and is specially targeted at load
lock, transfer chamber with large volume of non-corrosive gas that requires fast pump down time.
This pump is proven on LCD, photovoltaic and semiconductor production (MO-CVD).
Designed for fast pump down on large volume chamber
Intelligent motor speed control function for flexible gas throughput
Large diameter rotors enables compact size as pump unit
Advanced warning & alarm data storage capability