Dry Vacuum Pump ESA Series

The ESA series was developed for pumping large volume of gases and is specially targeted at load
lock, transfer chamber with large volume of non-corrosive gas that requires fast pump down time.
This pump is proven on LCD, photovoltaic and semiconductor production (MO-CVD).
Features:
 Designed for fast pump down on large volume chamber
 Intelligent motor speed control function for flexible gas throughput
 Large diameter rotors enables compact size as pump unit
 Advanced warning & alarm data storage capability