Dry Vacuum Pump ESA Series

All Pages
Dry Vacuum Pump ESA Series

Precision Machinery Products

Dry Vacuum Pump ESA Series



The ESA series was developed for pumping large volume of gases and is specially targeted at load
lock, transfer chamber with large volume of non-corrosive gas that requires fast pump down time.
This pump is proven on LCD, photovoltaic and semiconductor production (MO-CVD).
 Designed for fast pump down on large volume chamber
 Intelligent motor speed control function for flexible gas throughput
 Large diameter rotors enables compact size as pump unit
 Advanced warning & alarm data storage capability