Gas Abatement System
Gas Abatement System
G5
EBARA’s Model G5 is a universal abatement capable of abating majority of general processing and
cleaning gases including PFCs used in the semiconductors, LCD panels, solar cells, and LED
manufacturing.
The G5 is a unique abatement equipped with a patented "rolling" burner that enables reliable PFC
abatement to an unprecedented low level. The system is equipped with a large water tank for
efficient absorption of water soluble gases and solid burn products.
This compact system automatically removes powdery by-products with on-demand operation, thus
achieving reduction in maintenance and running cost.
Features:
High efficient abatement of various material gases such as global warming gases including
PFCs
Low Cost of Ownership by on-demand operation of changing necessary fuel volume due to
variety of gases
High up-time by the feature of removing powdery by-product