Dry Vacuum Pump EV-S Series

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Dry Vacuum Pump EV-S Series

Precision Machinery Products

Dry Vacuum Pump EV-S Series

EV-S

Description:

Efficient and Energy Saving
The need to reduce energy is a major subject for sustainability. Manufacturers employ large numbers
of aging dry vacuum pumps. Depending on the process, the vacuum system alone can contribute up
to 60% of the total electricity demand for a process tool. Upgrading the vacuum pumps can reduce
the fab's energy consumption and save your money.
EBARA has developed a new and more efficient vacuum pump designed by improving motor
efficiencies, optimized number of compression stages, enhancing motor control and adding intelligent
communications, the energy consumption of the dry pump will be significantly reduced. This results
in lower operation costs and improved profitability for our customer.
Customer Benefits:
 Lowest power consumption: Decreased user's Cost of Ownership and reduced company's
carbon emissions
 Smaller weight and dimensions compared to earlier models: User friendly
 No N2 purge in clean applications: No nitrogen required
 Flexible rotation speed and idle mode as standard: Further power saving

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