Dry Vacuum Pump ESR Series

The ESR-series was developed to meet the needs of lower power consumption and smaller pump
foot print.
These model are extremely suitable for light & medium process like SEM, Load Lock , PVD, Ashing ,
Ion Implantation and Etch,
The ESR20N, ESR80WN and ESR200WN models has controllable pumping speed which can provide
suitable vacuum range to cater more specifically to the process applications.
In general, the ESR series has a reduced power consumption of up to 60% compared to the AA-series
and is 40% smaller in foot print, 50% smaller in volume and 30% lighter weight.